Challenges and Opportunities in PFAS Waste Management for Semiconductor Manufacturing
Devashish Gokhale; Gabriel A. Cerrón-Calle; Mitchell L. Kim-Fu; Kenneth Flores; Anaira Román Santiago; Shao-Wei Tsai; Diana S. Aga; Nirupam Aich; Mamadou S. Diallo; Kyle Doudrick; David Hanigan; Raúl Hernández Sánchez; John Howarter; Jianbing “Jimmy” Jiang; Gerrad D. Jones; Linda S. Lee; Haizhou Liu; Katherine E. Manz; Erica R. McKenzie; Lokesh P. Padhye
- Published
- Publisher
- American Chemical Society (ACS)
- Journal / collection
- Environmental Science & Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1021/acs.est.5c10109
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Cite this source
Devashish Gokhale; Gabriel A. Cerrón-Calle; Mitchell L. Kim-Fu; Kenneth Flores; Anaira Román Santiago; Shao-Wei Tsai; Diana S. Aga; Nirupam Aich; Mamadou S. Diallo; Kyle Doudrick; David Hanigan; Raúl Hernández Sánchez; John Howarter; Jianbing “Jimmy” Jiang; Gerrad D. Jones; Linda S. Lee; Haizhou Liu; Katherine E. Manz; Erica R. McKenzie; Lokesh P. Padhye. Challenges and Opportunities in PFAS Waste Management for Semiconductor Manufacturing. Environmental Science & Technology. 2026-01-14. https://doi.org/10.1021/acs.est.5c10109