B4C and WC as viable alternatives to SiC for plasma-facing components in semiconductor manufacturing
Hun Shim; Young-Jo Park; Seong-Hyeon Hong
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Applied Surface Science
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.apsusc.2025.162960
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Cite this source
Hun Shim; Young-Jo Park; Seong-Hyeon Hong. B4C and WC as viable alternatives to SiC for plasma-facing components in semiconductor manufacturing. Applied Surface Science. 2025-07. https://doi.org/10.1016/j.apsusc.2025.162960