Optimize the Si3N4 passivation film of GaAs photoconductive semiconductor switch
Kang Liu; Liping Lai; Lizhen Gao
- Published
- Publisher
- SPIE
- Journal / collection
- Fifth International Conference on Optics and Communication Technology (ICOCT 2025)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3092660
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Cite this source
Kang Liu; Liping Lai; Lizhen Gao. Optimize the Si3N4 passivation film of GaAs photoconductive semiconductor switch. Fifth International Conference on Optics and Communication Technology (ICOCT 2025). 2025-12-19. https://doi.org/10.1117/12.3092660