Bionic-inspired intelligent detection of surface defects on semiconductor silicon wafers
Weisheng Cheng; Zexiao Li; Juncheng Yu; Fuqi Sun; Guoyuan Lyu; Xiaodong Zhang
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Measurement Science and Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1361-6501/ae7aa3
The original publisher provides the full text and its access options.
Cite this source
Weisheng Cheng; Zexiao Li; Juncheng Yu; Fuqi Sun; Guoyuan Lyu; Xiaodong Zhang. Bionic-inspired intelligent detection of surface defects on semiconductor silicon wafers. Measurement Science and Technology. 2026-06-19. https://doi.org/10.1088/1361-6501/ae7aa3