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Research literature / Conference paper

Knowledge-Driven Multi-Agent AI for Interpretable Yield Optimization in Semiconductor Manufacturing

Chaojun Geng; Degang Wang; Yanan Liu; Xiupeng Shi

Published
Publisher
IEEE
Journal / collection
2025 4th International Conference on Artificial Intelligence, Human-Computer Interaction and Robotics (AIHCIR)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/aihcir67580.2025.11404861

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Chaojun Geng; Degang Wang; Yanan Liu; Xiupeng Shi. Knowledge-Driven Multi-Agent AI for Interpretable Yield Optimization in Semiconductor Manufacturing. 2025 4th International Conference on Artificial Intelligence, Human-Computer Interaction and Robotics (AIHCIR). 2025-11-28. https://doi.org/10.1109/aihcir67580.2025.11404861

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