Automated SEM image processing for precision metrology in semiconductor devices
Osman Çiçek; Hasan Makara
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Surfaces and Interfaces
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.surfin.2026.109642
The original publisher provides the full text and its access options.
Cite this source
Osman Çiçek; Hasan Makara. Automated SEM image processing for precision metrology in semiconductor devices. Surfaces and Interfaces. 2026-08. https://doi.org/10.1016/j.surfin.2026.109642