Deep reinforcement learning for scheduling semiconductor cluster tools in varying configurations
Jongwon Choi; Seoung Bum Kim
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Scientific Reports
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1038/s41598-025-31722-7
The original publisher provides the full text and its access options.
Cite this source
Jongwon Choi; Seoung Bum Kim. Deep reinforcement learning for scheduling semiconductor cluster tools in varying configurations. Scientific Reports. 2025-12-17. https://doi.org/10.1038/s41598-025-31722-7