Laser Scribing of Copper/Low-k Dielectric Semiconductor Materials by Nanosecond and Ultrafast Pulsewidth Lasers
A. Hooper; D. Barsic; H. Zhang; J. O’Brien
- Published
- Publisher
- IMAPS - International Microelectronics Assembly and Packaging Society
- Journal / collection
- IMAPSource Proceedings
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.4071/001c.162059
The original publisher provides the full text and its access options.
Cite this source
A. Hooper; D. Barsic; H. Zhang; J. O’Brien. Laser Scribing of Copper/Low-k Dielectric Semiconductor Materials by Nanosecond and Ultrafast Pulsewidth Lasers. IMAPSource Proceedings. 2026-05-11. https://doi.org/10.4071/001c.162059