Cycle Time Optimization in Scheduling Automated Bench Cleaning Tool for Semiconductor Manufacturing
Luetao Li; Siwei Zhang; Yan Qiao; Naiqi Wu; Jie Li; Bai Yang
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Access
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/access.2026.3679299
The original publisher provides the full text and its access options.
Cite this source
Luetao Li; Siwei Zhang; Yan Qiao; Naiqi Wu; Jie Li; Bai Yang. Cycle Time Optimization in Scheduling Automated Bench Cleaning Tool for Semiconductor Manufacturing. IEEE Access. 2026. https://doi.org/10.1109/access.2026.3679299