Precise identification of subnanometer chemical defects within a fin field-effect transistor
Yu-Ting Peng; Yu-Lun Liu; Mu-Tung Chang; Chien-Nan Hsiao; Hung-I Su; Shen-Chuan Lo; Chien-Chun Chen
- Published
- Publisher
- American Vacuum Society
- Journal / collection
- Journal of Vacuum Science & Technology B
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1116/6.0005444
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Cite this source
Yu-Ting Peng; Yu-Lun Liu; Mu-Tung Chang; Chien-Nan Hsiao; Hung-I Su; Shen-Chuan Lo; Chien-Chun Chen. Precise identification of subnanometer chemical defects within a fin field-effect transistor. Journal of Vacuum Science & Technology B. 2026-05-21. https://doi.org/10.1116/6.0005444