Deep learning-based object detection in electron microscopy for semiconductor analysis: advances, challenges, and perspectives
Yuxun Zheng; K.-W. (G.H.) A. Chee; Liangxiao Ding; Zhiyou Jin
- Published
- Publisher
- Institution of Engineering and Technology (IET)
- Journal / collection
- IET Conference Proceedings
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1049/icp.2025.2627
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Cite this source
Yuxun Zheng; K.-W. (G.H.) A. Chee; Liangxiao Ding; Zhiyou Jin. Deep learning-based object detection in electron microscopy for semiconductor analysis: advances, challenges, and perspectives. IET Conference Proceedings. 2025-08. https://doi.org/10.1049/icp.2025.2627