Risk assessment and safety design improvement for emission gas treatment system in semiconductor manufacturing process
Won Chang Shin; Dal Jae Park
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Loss Prevention in the Process Industries
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jlp.2026.106039
The original publisher provides the full text and its access options.
Cite this source
Won Chang Shin; Dal Jae Park. Risk assessment and safety design improvement for emission gas treatment system in semiconductor manufacturing process. Journal of Loss Prevention in the Process Industries. 2026-08. https://doi.org/10.1016/j.jlp.2026.106039