MEMS—suspended gate field effect transistor (SGFET) accelerometer process integration with parylene flexure and plasma doping
Pramod Martha; Naveen Kadayinti; V Seena
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Journal of Micromechanics and Microengineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1361-6439/adfe75
The original publisher provides the full text and its access options.
Cite this source
Pramod Martha; Naveen Kadayinti; V Seena. MEMS—suspended gate field effect transistor (SGFET) accelerometer process integration with parylene flexure and plasma doping. Journal of Micromechanics and Microengineering. 2025-09-03. https://doi.org/10.1088/1361-6439/adfe75