Fast ptychographic imaging of semiconductor structures at grazing incidence
Paolo Ansuinelli; Hojun Lee; Wookrae Kim; Junho Shin; Yasin Ekinci; Iacopo Mochi
- Published
- Publisher
- SPIE
- Journal / collection
- Photomask Technology 2025
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3072917
The original publisher provides the full text and its access options.
Cite this source
Paolo Ansuinelli; Hojun Lee; Wookrae Kim; Junho Shin; Yasin Ekinci; Iacopo Mochi. Fast ptychographic imaging of semiconductor structures at grazing incidence. Photomask Technology 2025. 2025-11-06. https://doi.org/10.1117/12.3072917