From Atoms to Reactors: Multi-Scale Modeling for Semiconductor Fabrication
Lado Filipovic
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/sispad66650.2025.11186356
The original publisher provides the full text and its access options.
Cite this source
Lado Filipovic. From Atoms to Reactors: Multi-Scale Modeling for Semiconductor Fabrication. 2025 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD). 2025-09-24. https://doi.org/10.1109/sispad66650.2025.11186356