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Research literature / Conference paper

Development of Autonomous Failure Maintenance System for Semiconductor Manufacturing

Nuri Han; Jiwon Seo; Jonghee Ha; Jihyung Oh; Jinwoo Lee; Boram Jeong; Jongbin Park; Gilhwan Kim; Yohwan Joo

Published
Publisher
ACM
Journal / collection
Proceedings of the 34th ACM International Conference on Information and Knowledge Management
Research area
Semiconductors
Source type
Conference paper
DOI
10.1145/3746252.3761556

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Nuri Han; Jiwon Seo; Jonghee Ha; Jihyung Oh; Jinwoo Lee; Boram Jeong; Jongbin Park; Gilhwan Kim; Yohwan Joo. Development of Autonomous Failure Maintenance System for Semiconductor Manufacturing. Proceedings of the 34th ACM International Conference on Information and Knowledge Management. 2025-11-10. https://doi.org/10.1145/3746252.3761556

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