Nanosheet Oxide Semiconductor Transistors for 3D integrated devices
Masaharu Kobayashi
- Published
- Publisher
- The Japan Society of Applied Physics
- Journal / collection
- Extended Abstracts of the 2025 International Conference on Solid State Devices and Materials
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.7567/ssdm.2025.n-1-01
The original publisher provides the full text and its access options.
Cite this source
Masaharu Kobayashi. Nanosheet Oxide Semiconductor Transistors for 3D integrated devices. Extended Abstracts of the 2025 International Conference on Solid State Devices and Materials. 2025-09-16. https://doi.org/10.7567/ssdm.2025.n-1-01