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Amorphous Hafnium-Aluminum Oxide and IGZO by Spray Pyrolysis for Low Power Thin Film Transistor Electronics

Samiran Roy; Jewel Kumer Saha; Jin Jang

Published
Publisher
Elsevier BV
Journal / collection
Applied Surface Science
Research area
Semiconductors
Source type
Journal article
DOI
10.1016/j.apsusc.2026.166327

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Samiran Roy; Jewel Kumer Saha; Jin Jang. Amorphous Hafnium-Aluminum Oxide and IGZO by Spray Pyrolysis for Low Power Thin Film Transistor Electronics. Applied Surface Science. 2026-06. https://doi.org/10.1016/j.apsusc.2026.166327

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