Skip to content
OPEN VARIABLE

Evidence-First Signal Intelligence

Menu

Research literature / Conference paper

An Embedded Virtual Metrology Tree-based Model of Machine Learning in Semiconductor Fabrication Application

Yawei Chen; Shaohua Chang; Eric Chien

Published
Publisher
IEEE
Journal / collection
2025 IEEE 9th International Conference on Software Engineering & Computer Systems (ICSECS)
Research area
AI & compute
Source type
Conference paper
DOI
10.1109/icsecs65227.2025.11278911

Read the original source ↗

The original publisher provides the full text and its access options.

Cite this source

Yawei Chen; Shaohua Chang; Eric Chien. An Embedded Virtual Metrology Tree-based Model of Machine Learning in Semiconductor Fabrication Application. 2025 IEEE 9th International Conference on Software Engineering & Computer Systems (ICSECS). 2025-10-15. https://doi.org/10.1109/icsecs65227.2025.11278911

Download RIS