Image registration using perspective transformation for multimodal analysis of crystalline defects in semiconductor wafers
Kosei Takahashi; Kota Tsujimori; Yasutaka Matsubara; Keisuke Seo; Michio Kawase; Seiya Mizutani; Yuya Mizutani; Seiji Mizutani; Kenta Murayama; Shunta Harada
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Japanese Journal of Applied Physics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.35848/1347-4065/ae5ee5
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Cite this source
Kosei Takahashi; Kota Tsujimori; Yasutaka Matsubara; Keisuke Seo; Michio Kawase; Seiya Mizutani; Yuya Mizutani; Seiji Mizutani; Kenta Murayama; Shunta Harada. Image registration using perspective transformation for multimodal analysis of crystalline defects in semiconductor wafers. Japanese Journal of Applied Physics. 2026-05-08. https://doi.org/10.35848/1347-4065/ae5ee5