Transformer-based prediction of temperature-dependent adsorption equilibrium on porous adsorbents in semiconductor cleanroom environments
Ruiqing Chen; Ming Yang; Yusen Wang; Xilei Dai; Junjie Liu
- Published
- Publisher
- SAGE Publications
- Journal / collection
- Indoor and Built Environment
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1177/1420326x261487796
The original publisher provides the full text and its access options.
Cite this source
Ruiqing Chen; Ming Yang; Yusen Wang; Xilei Dai; Junjie Liu. Transformer-based prediction of temperature-dependent adsorption equilibrium on porous adsorbents in semiconductor cleanroom environments. Indoor and Built Environment. 2026-09-16. https://doi.org/10.1177/1420326x261487796