Two-Level Pareto-Based Hierarchical Reinforcement Learning for Dynamic Multi-Objective Scheduling in Semiconductor Fabs
Chin-Yi Lin; Tzu-Liang Tseng; Tsung-Han Tsai
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2026.3704324
The original publisher provides the full text and its access options.
Cite this source
Chin-Yi Lin; Tzu-Liang Tseng; Tsung-Han Tsai. Two-Level Pareto-Based Hierarchical Reinforcement Learning for Dynamic Multi-Objective Scheduling in Semiconductor Fabs. IEEE Transactions on Semiconductor Manufacturing. 2026-08. https://doi.org/10.1109/tsm.2026.3704324