Effect of Semiconductor Surface Characteristics & Cleaning Chemicals on Contact Angle Measurement
Tatt Wai Wan; Pei Li Ooi; Yong Sheng Chong; Masrina Mohd Nadzir
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/asmc69324.2026.11551232
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Cite this source
Tatt Wai Wan; Pei Li Ooi; Yong Sheng Chong; Masrina Mohd Nadzir. Effect of Semiconductor Surface Characteristics & Cleaning Chemicals on Contact Angle Measurement. 2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2026-05-11. https://doi.org/10.1109/asmc69324.2026.11551232