Machine Learning for Predictive Maintenance in Semiconductor SEM Equipment
Texas A&M University - Kingsville; Kai Jin; Edgar Olivares; Hua Li
- Published
- Publisher
- Curran Associates, Inc.
- Journal / collection
- IISE Annual Conference & Expo 2025
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.21872/annual2025_5628
The original publisher provides the full text and its access options.
Cite this source
Texas A&M University - Kingsville; Kai Jin; Edgar Olivares; Hua Li. Machine Learning for Predictive Maintenance in Semiconductor SEM Equipment. IISE Annual Conference & Expo 2025. 2025-08-01. https://doi.org/10.21872/annual2025_5628