Optimization-based algorithm for single-frame interferometric nanometrology of semiconductor structures
Damian Suski; Maria Cywińska; Julianna Winnik; Michał Józwik; Piotr Zdańkowski; Azeem Ahmad; Balpreet S. Ahluwalia; Maciej Trusiak
- Published
- Publisher
- SPIE
- Journal / collection
- Optics and Photonics for Advanced Dimensional Metrology IV
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3099756
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Cite this source
Damian Suski; Maria Cywińska; Julianna Winnik; Michał Józwik; Piotr Zdańkowski; Azeem Ahmad; Balpreet S. Ahluwalia; Maciej Trusiak. Optimization-based algorithm for single-frame interferometric nanometrology of semiconductor structures. Optics and Photonics for Advanced Dimensional Metrology IV. 2026-05-29. https://doi.org/10.1117/12.3099756