Machine Learning Models for Yield Enhancement and Defect Detection in Semiconductor Manufacturing
Kristipati Shivani; Mallavaram Meghana; S. Asha; S. Kumaran
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 IEEE 1st International Conference on Instrumentation (INSTCon)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/instcon69741.2026.11691854
The original publisher provides the full text and its access options.
Cite this source
Kristipati Shivani; Mallavaram Meghana; S. Asha; S. Kumaran. Machine Learning Models for Yield Enhancement and Defect Detection in Semiconductor Manufacturing. 2026 IEEE 1st International Conference on Instrumentation (INSTCon). 2026-07. https://doi.org/10.1109/instcon69741.2026.11691854