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Research literature / Conference paper

Manufacturing Process of High-resistivity Silicon-based Transmission Line

Tingting Wang; Shicheng Yang; Ping Wang; Xuzhou Jia; Feng Wang; Haitao Huang; Jiangpeng Wu

Published
Publisher
IEEE
Journal / collection
2025 IEEE MTT-S International Microwave Workshop Series On Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)
Research area
Industrial systems
Source type
Conference paper
DOI
10.1109/imws-amp66175.2025.11136254

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Tingting Wang; Shicheng Yang; Ping Wang; Xuzhou Jia; Feng Wang; Haitao Huang; Jiangpeng Wu. Manufacturing Process of High-resistivity Silicon-based Transmission Line. 2025 IEEE MTT-S International Microwave Workshop Series On Advanced Materials and Processes for RF and THz Applications (IMWS-AMP). 2025-07-23. https://doi.org/10.1109/imws-amp66175.2025.11136254

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