Integrating large language models into manufacturing execution systems: A systematic framework for photoresist manufacturing processes
Shu-Kai S. Fan; Jiun-Tze Wang; Chih-Hung Jen
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Computers & Industrial Engineering
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1016/j.cie.2025.111599
The original publisher provides the full text and its access options.
Cite this source
Shu-Kai S. Fan; Jiun-Tze Wang; Chih-Hung Jen. Integrating large language models into manufacturing execution systems: A systematic framework for photoresist manufacturing processes. Computers & Industrial Engineering. 2026-01. https://doi.org/10.1016/j.cie.2025.111599