Development of a Memory-Efficient AI-based Anomaly Detection Algorithm for Semiconductor Thermal Process
Junho Hwang; Sunuwe Kim; Sangwook Park
- Published
- Publisher
- The Korean Society of Mechanical Engineers
- Journal / collection
- Transactions of the Korean Society of Mechanical Engineers - B
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3795/ksme-b.2026.50.6.295
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Cite this source
Junho Hwang; Sunuwe Kim; Sangwook Park. Development of a Memory-Efficient AI-based Anomaly Detection Algorithm for Semiconductor Thermal Process. Transactions of the Korean Society of Mechanical Engineers - B. 2026-06-30. https://doi.org/10.3795/ksme-b.2026.50.6.295