A Hierarchical State Feature-Driven Deep Reinforcement Learning Framework for Semiconductor Fabrication AGV Path Planning
XinLin Yang; BoYang Zhang; YanTing Ni
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Journal of Control, Automation and Electrical Systems
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s40313-026-01290-w
The original publisher provides the full text and its access options.
Cite this source
XinLin Yang; BoYang Zhang; YanTing Ni. A Hierarchical State Feature-Driven Deep Reinforcement Learning Framework for Semiconductor Fabrication AGV Path Planning. Journal of Control, Automation and Electrical Systems. 2026-06-24. https://doi.org/10.1007/s40313-026-01290-w