Development of maskless technologies of wide bandgap semiconductor devices by laser microprocessing
Irmantas Kašalynas; Justinas Jorudas; Simonas Indrišiūnas; Laimis Zubauskas; Maxim Moscotin; Paulius Gečys
- Published
- Publisher
- SPIE
- Journal / collection
- Gallium Nitride Materials and Devices XXI
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3081930
The original publisher provides the full text and its access options.
Cite this source
Irmantas Kašalynas; Justinas Jorudas; Simonas Indrišiūnas; Laimis Zubauskas; Maxim Moscotin; Paulius Gečys. Development of maskless technologies of wide bandgap semiconductor devices by laser microprocessing. Gallium Nitride Materials and Devices XXI. 2026-03-05. https://doi.org/10.1117/12.3081930