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Time-synchronized sensor clustering via rare events: A case study in semiconductor manufacturing processes

Mahya Qorbani; Myunggeun Song; Kamran Paynabar

Published
Publisher
Informa UK Limited
Journal / collection
Journal of Quality Technology
Research area
Semiconductors
Source type
Journal article
DOI
10.1080/00224065.2026.2645966

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Mahya Qorbani; Myunggeun Song; Kamran Paynabar. Time-synchronized sensor clustering via rare events: A case study in semiconductor manufacturing processes. Journal of Quality Technology. 2026-04-21. https://doi.org/10.1080/00224065.2026.2645966

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