Augmented physics-based virtual metrology for chemical–mechanical planarization in semiconductor manufacturing
Varad Maitra; Jing Shi
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Manufacturing Letters
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.mfglet.2025.06.173
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Cite this source
Varad Maitra; Jing Shi. Augmented physics-based virtual metrology for chemical–mechanical planarization in semiconductor manufacturing. Manufacturing Letters. 2025-08. https://doi.org/10.1016/j.mfglet.2025.06.173