Research on Determination of Semiconductor Epitaxial Layer Thickness Employing Electromagnetic Computation
Yunkai Du; Ying He
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 8th International Conference on Information Science, Electrical and Automation Engineering (ISEAE)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/iseae69422.2026.11544367
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Cite this source
Yunkai Du; Ying He. Research on Determination of Semiconductor Epitaxial Layer Thickness Employing Electromagnetic Computation. 2026 8th International Conference on Information Science, Electrical and Automation Engineering (ISEAE). 2026-04-18. https://doi.org/10.1109/iseae69422.2026.11544367