Integrated wafer storage and transportation with conditional nitrogen cabinet utilization in semiconductor assembly manufacturing systems
Yi-Chun Peng
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- The International Journal of Advanced Manufacturing Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s00170-026-18526-3
The original publisher provides the full text and its access options.
Cite this source
Yi-Chun Peng. Integrated wafer storage and transportation with conditional nitrogen cabinet utilization in semiconductor assembly manufacturing systems. The International Journal of Advanced Manufacturing Technology. 2026-06-29. https://doi.org/10.1007/s00170-026-18526-3