Automated End-to-End AI Solution for Photon Emission Microscopy in Semiconductor Failure Analysis
Guofeng You; Silambarasan Karuppannan; Kan Sun; Wilson Lee Cheng Hoe; Grace Tan
- Published
- Publisher
- ASM International
- Journal / collection
- EDFA Technical Articles
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.31399/asm.edfa.2026-3.p018
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Cite this source
Guofeng You; Silambarasan Karuppannan; Kan Sun; Wilson Lee Cheng Hoe; Grace Tan. Automated End-to-End AI Solution for Photon Emission Microscopy in Semiconductor Failure Analysis. EDFA Technical Articles. 2026-08-01. https://doi.org/10.31399/asm.edfa.2026-3.p018