P‐7.27: Research on the Application of Composite Etching Technology in Thin‐Film Transistor Liquid Crystal Display
Zhao-jian WU; Xun-ze ZHANG; Ya-dong XU; Xiao-qi ZHENG
- Published
- Publisher
- Wiley
- Journal / collection
- SID Symposium Digest of Technical Papers
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1002/sdtp.70003_407
The original publisher provides the full text and its access options.
Cite this source
Zhao-jian WU; Xun-ze ZHANG; Ya-dong XU; Xiao-qi ZHENG. P‐7.27: Research on the Application of Composite Etching Technology in Thin‐Film Transistor Liquid Crystal Display. SID Symposium Digest of Technical Papers. 2026-08. https://doi.org/10.1002/sdtp.70003_407