A Transformer-Based Sequence Prediction Architecture for Etch Profile Evolution in Semiconductor Manufacturing
Jianming Guo; Kun Ren; Dawei Gao; Dong Ni
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2026.3669891
The original publisher provides the full text and its access options.
Cite this source
Jianming Guo; Kun Ren; Dawei Gao; Dong Ni. A Transformer-Based Sequence Prediction Architecture for Etch Profile Evolution in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing. 2026-05. https://doi.org/10.1109/tsm.2026.3669891