Selective probing method using SEM for inline electrical inspection of semiconductor devices
Shota Mitsugi; Hiroki Watanabe; Minami Shoji; Yohei Nakamura; Yasuhiro Shirasaki; Satoshi Takada
- Published
- Publisher
- SPIE
- Journal / collection
- Metrology, Inspection, and Process Control XXXIX
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3060331
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Cite this source
Shota Mitsugi; Hiroki Watanabe; Minami Shoji; Yohei Nakamura; Yasuhiro Shirasaki; Satoshi Takada. Selective probing method using SEM for inline electrical inspection of semiconductor devices. Metrology, Inspection, and Process Control XXXIX. 2025-04-23. https://doi.org/10.1117/12.3060331