LSTM-CNN Hybrid Neural Network for Time-Series Semiconductor Manufacturing Quality Prediction
Hongfeng Song; Boshi Wu; Hao Wang
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 5th International Conference on Computer Science, Electronic Information Engineering and Intelligent Control Technology (CEI)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/cei66465.2025.11398656
The original publisher provides the full text and its access options.
Cite this source
Hongfeng Song; Boshi Wu; Hao Wang. LSTM-CNN Hybrid Neural Network for Time-Series Semiconductor Manufacturing Quality Prediction. 2025 5th International Conference on Computer Science, Electronic Information Engineering and Intelligent Control Technology (CEI). 2025-11-21. https://doi.org/10.1109/cei66465.2025.11398656