A Novel Health Index Framework for Semiconductor Equipment Using Multi-View Data
Jeongsun Ahn; Sang-Hyun Cho; Hong-Yeon Kim; Hongyeon Kim; Hyeonjeong Choi; Dain Ham; Yongjo Kim; Hyun-Jung Kim
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2026.3665568
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Cite this source
Jeongsun Ahn; Sang-Hyun Cho; Hong-Yeon Kim; Hongyeon Kim; Hyeonjeong Choi; Dain Ham; Yongjo Kim; Hyun-Jung Kim. A Novel Health Index Framework for Semiconductor Equipment Using Multi-View Data. IEEE Transactions on Semiconductor Manufacturing. 2026-05. https://doi.org/10.1109/tsm.2026.3665568