Vision Transformer network for optical overlay metrology on semiconductor wafers
L. de Wolf; M. Lipp; M. Cochez; A. den Boef; L. V. Amitonova
- Published
- Publisher
- AIP Publishing
- Journal / collection
- APL Machine Learning
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0301749
The original publisher provides the full text and its access options.
Cite this source
L. de Wolf; M. Lipp; M. Cochez; A. den Boef; L. V. Amitonova. Vision Transformer network for optical overlay metrology on semiconductor wafers. APL Machine Learning. 2026-01-02. https://doi.org/10.1063/5.0301749