Recent advances in precision deposition techniques on semiconductor surfaces: Mechanisms, methods, and applications
Hao Zhu; Wenqi Zhang; Kangcheng Zhao; Chaolong Jin; Zhaoyang Zhang; Kun Xu; Yang Liu; Jingtao Wang; Viboon Saetang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Materials Today Communications
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.mtcomm.2025.113495
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Cite this source
Hao Zhu; Wenqi Zhang; Kangcheng Zhao; Chaolong Jin; Zhaoyang Zhang; Kun Xu; Yang Liu; Jingtao Wang; Viboon Saetang. Recent advances in precision deposition techniques on semiconductor surfaces: Mechanisms, methods, and applications. Materials Today Communications. 2025-09. https://doi.org/10.1016/j.mtcomm.2025.113495