Algorithm for automated alignment and search of contact areas on semiconductor wafers
Igor Shraifel; Andrey Mikhailov; Igor Maltcev; Irina Mikhailova; Aleksandr Zelensky; Mikhail Kharkov; Viacheslav Voronin; Kirill Danilin; Evgenii Semenishchev
- Published
- Publisher
- SPIE
- Journal / collection
- Real-Time Image Processing and Deep Learning 2026
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3101791
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Cite this source
Igor Shraifel; Andrey Mikhailov; Igor Maltcev; Irina Mikhailova; Aleksandr Zelensky; Mikhail Kharkov; Viacheslav Voronin; Kirill Danilin; Evgenii Semenishchev. Algorithm for automated alignment and search of contact areas on semiconductor wafers. Real-Time Image Processing and Deep Learning 2026. 2026-06-11. https://doi.org/10.1117/12.3101791