D2Seg: Dual-Image Differential Interleaved Semantic Segmentation Network for Accurate Semiconductor Wafer Surface Defect Detection
Zhaolei Diao; Shuang Mei; Jiangtao Cheng; Yuzhang He; Guojun Wen
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2026.3689722
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Cite this source
Zhaolei Diao; Shuang Mei; Jiangtao Cheng; Yuzhang He; Guojun Wen. D2Seg: Dual-Image Differential Interleaved Semantic Segmentation Network for Accurate Semiconductor Wafer Surface Defect Detection. IEEE Transactions on Semiconductor Manufacturing. 2026-08. https://doi.org/10.1109/tsm.2026.3689722