A digital twin calibration for an automated material handling system in a semiconductor fab
Bonggwon Kang; Chiwoo Park; Haejoong Kim; Soondo Hong
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Manufacturing Systems
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jmsy.2025.04.015
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Cite this source
Bonggwon Kang; Chiwoo Park; Haejoong Kim; Soondo Hong. A digital twin calibration for an automated material handling system in a semiconductor fab. Journal of Manufacturing Systems. 2025-06. https://doi.org/10.1016/j.jmsy.2025.04.015