Unintended Catalysis and Defect Formation in Electroless Metallization of Semiconductor Wafers
Phey Yee Foong; Nurhanani Zakaria; Theng Theng Tan; Zhi En Er; Chaowei Du
- Published
- Publisher
- Penerbit Universiti Malaysia Perlis
- Journal / collection
- International Journal of Nanoelectronics and Materials (IJNeaM)
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.58915/ijneam.v18idecember.2823
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Cite this source
Phey Yee Foong; Nurhanani Zakaria; Theng Theng Tan; Zhi En Er; Chaowei Du. Unintended Catalysis and Defect Formation in Electroless Metallization of Semiconductor Wafers. International Journal of Nanoelectronics and Materials (IJNeaM). 2025-12-31. https://doi.org/10.58915/ijneam.v18idecember.2823