Advances in intelligent epitaxy of semiconductor materials
Chao Shen; Kang Yang; Wenkang Zhan; Bo Xu; Zhaonan Li; Shujie Pan; Siming Chen; Zhanguo Wang; Chao Zhao
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Progress in Quantum Electronics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.pquantelec.2025.100587
The original publisher provides the full text and its access options.
Cite this source
Chao Shen; Kang Yang; Wenkang Zhan; Bo Xu; Zhaonan Li; Shujie Pan; Siming Chen; Zhanguo Wang; Chao Zhao. Advances in intelligent epitaxy of semiconductor materials. Progress in Quantum Electronics. 2025-09. https://doi.org/10.1016/j.pquantelec.2025.100587