Transfer of Freestanding Fluoropolymer Films for Advanced Semiconductor Devices
Mohammad Monish; Koki Hino; Yosuke Sasama; Masato Urakami; Takehiro Ota; Kenji Sakamoto; Kenichiro Takakura; Yamaguchi Takahide
- Published
- Publisher
- American Chemical Society (ACS)
- Journal / collection
- ACS Applied Materials & Interfaces
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1021/acsami.6c05045
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Cite this source
Mohammad Monish; Koki Hino; Yosuke Sasama; Masato Urakami; Takehiro Ota; Kenji Sakamoto; Kenichiro Takakura; Yamaguchi Takahide. Transfer of Freestanding Fluoropolymer Films for Advanced Semiconductor Devices. ACS Applied Materials & Interfaces. 2026-08-27. https://doi.org/10.1021/acsami.6c05045