Process Performance Evaluation of Modified Semiconductor Scrubber System via Process Simulation
Subeen Wi; Jonghyuk Yoon; Hyoungwoon Song
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Korean Journal of Chemical Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s11814-026-00764-6
The original publisher provides the full text and its access options.
Cite this source
Subeen Wi; Jonghyuk Yoon; Hyoungwoon Song. Process Performance Evaluation of Modified Semiconductor Scrubber System via Process Simulation. Korean Journal of Chemical Engineering. 2026-06-29. https://doi.org/10.1007/s11814-026-00764-6